SpringerBriefs in Applied Sciences and Technology Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors - Toan Dinh Nam-Trung Nguyen Dzung Viet Dao Kartoniert (TB)

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC) including the thermoresistive thermoelectric thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in thes e sensors the book provides useful guidance on developing high sensitivity and linearity fast-response SiC sensing devices based on thermoelectrical effects.