Market: Those involved in the design and use of UHV component systems. Written 25 years ago
this book explains both the design and use of UHV systems and components as well as the
underlying physical principles on which the performance of the equipment depends. Because of
its close association of these underlying physical principles with the practical problems
inherent in UHV equipment the book retains its value to this day. TOC:Contents:
Molecule-Molecule and Molecule-Interactions. Collision Processes in Gases. Interaction of
Charged Particles with Surfaces. Interaction of Radiation with Surfaces. Mechanical Properties
of Materials at Very Low Pressures. General Considerations of Pressure Measurement. Total
Pressure Gauges. Partial Pressure Gauges. Processing Techniques for Ultrahigh Vacuum. Pumps for
Ultrahigh Vacuum. Examples of Ultrahigh Vacuum Systems.
