This book presents the method of ion beam modification of solids in realization theory and
applications in a comprehensive way. It provides a review of the physical basics of ion-solid
interaction and on ion-beam induced structural modifications of solids. Ion beams are widely
used to modify the physical properties of materials. A complete theory of ion stopping in
matter and the calculation of the energy loss due to nuclear and electronic interactions are
presented including the effect of ion channeling. To explain structural modifications due to
high electronic excitations different concepts are presented with special emphasis on the
thermal spike model. Furthermore general concepts of damage evolution as a function of ion
mass ion fluence ion flux and temperature are described in detail and their limits and
applicability are discussed. The effect of nuclear and electronic energy loss on structural
modifications of solids such as damage formation phase transitions and amorphization is
reviewed for insulators and semiconductors. Finally some selected applications of ion beams are
given.
