The authoritative reference on catalytic chemical vapor deposition?written by the inventor of
the technologyThis comprehensive book covers a wide scope of Cat-CVD and related
technologies?from the fundamentals to the many applications including the design of a Cat-CVD
apparatus. Featuring contributions from four senior leaders in the field?including the father
of catalytic chemical vapor deposition?it also introduces some of the techniques used in the
observation of Cat-CVD related phenomena so that readers can understand the concepts of such
techniques.Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins
by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD such as
laser-induced fluorescence and deep ultra-violet absorption and explains in detail the
underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an
overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films.
The last parts of this unique book are devoted to the design and operation of Cat-CVD
apparatuses and the applications. -Provides coherent coverage of the fundamentals and
applications of catalytic chemical vapor deposition (Cat-CVD)-Assembles in one place the state
of the art of this rapidly growing field allowing new researchers to get an overview that is
difficult to obtain solely from journal articles-Presents comparisons of different Cat-CVD
methods which are usually not found in research papers-Bridges academic and industrial
research?showing how CVD can be scaled up from the lab to large-scale industrial utilization in
the high-tech industryCatalytic Chemical Vapor Deposition: Technology and Applications is an
excellent one-stop resource for researchers and engineers working on or entering the field of
Cat-CVD Hot-Wire CVD iCVD and related technologies.
