Introduction to Epitaxy provides the essential information for a comprehensive upper-level
graduate course treating the crystalline growth of semiconductor heterostructures.
Heteroepitaxy represents the basis of advanced electronic and optoelectronic devices today and
is considered one of the top fields in materials research. The book covers the structural and
electronic properties of strained epitaxial layers the thermodynamics and kinetics of layer
growth and the description of the major growth techniques metalorganic vapor phase epitaxy
molecular beam epitaxy and liquid phase epitaxy. Cubic semiconductors strain relaxation by
misfit dislocations strain and confinement effects on electronic states surface structures
and processes during nucleation and growth are treated in detail. The Introduction to Epitaxy
requires only little knowledge on solid-state physics. Students of natural sciences materials
science and electrical engineering as well as their lecturers benefit from elementary
introductions to theory and practice of epitaxial growth supported by pertinent references and
over 200 detailed illustrations.
