Superconducting Multilayer Technology for Josephson Devices Technology Engineering Physics Applications - Johannes Maximilian Meckbach Kartoniert (TB)

Within this thesis fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions aiding the realization of sophisticated Josephson devices such as SQUIDs flux-flow oscillators and long Josephson junctions with artificial phase discontinuities are presented in detail.