Given the fact of the increasing meaning of individual and functional micro- or nanostructures
it is of high interest to open up two-photon polymerization (TPP) as a structuring technology
for production. TPP offers real 3D capability while providing a line width beyond the
diffraction limit so arbitrary geometries with e. g. optical photonic or biological
functionalities can be realized. The disadvantage about this technology is its relative small
throughput when comparing it with established pro-cess chains in production so the aim is to
open up TPP as a mastering technology for metal substrates that serve as tools for injection
moulding. Within this thesis the main research question if TPP is suitable for the
structuring of metal tools for injection moulding is addressed. To control the process and
allow for a prediction of the voxel shape on metal surfaces a comprehensive model is
im-plemented in Matlab considering the temperature development in the metal surface during TPP
the polymerization process in the photosensitive hybrid polymer Ormo-Comp® as well as the final
intensity distribution resulting in a stationary wave due to the superposition of incident and
reflected laser beams. OrmoComp® is regarded here since it is a so called hybrid polymer
containing SiO2-groups that cause the polymerized material to be more resistant against the
harsh conditions during injec-tion moulding like high pressures and temperatures. To verify the
results of the model ascending scans were performed. A comparison of the line's cross sections
from the experiments and the calculated voxel shape shows good agreement also when considering
variations of the parameters like the exposure dose. Thus a model was implemented that allows
for the prediction of the resulting voxel shape during TPP on metal surfaces. Finally simple
geometries like cubes and semispheres were written on steel and casted with injection moulding
for a validation.
