This book reviews advances in cutting-edge micro- nano-electrometers and discusses the
technological challenges involved in their practical implementation. The detection of
electrostatic charge has a wide range of applications in ionization chambers bio-analyte and
aerosol particle instruments mass spectrometers scanning tunneling microscopes and even
quantum computers. Designing micro- nano-electrometers (also known as charge sensors) for
electrometry is considered vital because of the charge sensitivity and resolution issues at
micro- nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)
nanoelectromechanical systems (NEMSs) and advances in solid-state electronics hold
considerable potential for the design and fabrication of extremely sensitive charge sensors.
