Micro and Nano Machined Electrometers Gebunden

This book reviews advances in cutting-edge micro- nano-electrometers and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers bio-analyte and aerosol particle instruments mass spectrometers scanning tunneling microscopes and even quantum computers. Designing micro- nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro- nano-scales. The remarkably dynamic microelectromech anical systems (MEMSs) nanoelectromechanical systems (NEMSs) and advances in solid-state electronics hold considerable potential for the design and fabrication of extremely sensitive charge sensors.