EAN: 9783031009051

SYNTHESIS LECTURES ON EMERGING ENGINEERING TECH...

Silicon-on-Insulator (SOI) technology is widely used in high-performance and low-power
semiconductor devices. The SOI wafers have two layers of active silicon (Si)  and normally the
bottom Si layer is a mere physical structure. The idea of making intelligent pixel detectors by
using the bottom Si layer as sensors for X-ray  infrared light  high-energy particles  neutrons
etc. emerged from very early days of the SOI technology. However  there have been several
difficult issues with fabricating such detectors and they have not become very popular until
recently. This book offers a comprehensive overview of the basic concepts and research issues
of SOI radiation image detectors. It introduces basic issues to implement the SOI detector and
presents how to solve these issues. It also reveals fundamental techniques  improvement of
radiation tolerance  applications  and examples of the detectors. Since the SOI detector has
both a thick sensing region and CMOS transistors in a monolithic die  many ideas have emerged
to utilize this technology. This book is a good introduction for people who want to develop or
use SOI detectors.

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