This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion
Source (GFIS) column and contrast formation. It also provides first hand information on
nanofabrication and high resolution imaging. Relevant theoretical models and the existing
simulation approaches are discussed in an extra section. The structure of the book allows the
novice to get acquainted with the specifics of the technique needed to understand the more
applied chapters in the second half of the volume. The expert reader will find a complete
reference of the technique covering all important applications in several chapters written by
the leading experts in the field. This includes imaging of biological samples resist and
precursor based nanofabrication applications in semiconductor industry using Helium as well
as Neon and many more. The fundamental part allows the regular HIM user to deepen his
understanding of the method. A final chapter by Bill Ward one of the pioneers of HIM covering
the historical developments leading to the existing tool complements the content.
