Denise Reichel studies the delicate subject of temperature measurement during lamp-based
annealing of semiconductors in particular during flash lamp annealing. The approach of
background-correction using amplitude-modulated light to obtain the sample reflectivity is
reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents
a new method independent of the lamp operation to obtain this amplitude modulation and derives
a formula to describe the process. Further she investigates the variables of the formula in
depth to validate the method's suitability for background-corrected temperature measurement.
The experimental results finally proof its power for elevated temperatures.
