Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to
their counterparts in the integrated circuit world. Integrated silicon microtransducers are
realized using microfabrication techniques similar to those for standard integrated circuits
(ICs). Unlike IC devices however microtransducers must interact with their environment so
their numerical simulation is considerably more complex. While the design of ICs aims at
suppressing parasitic¿ effects microtransducers thrive on optimizing the one or the other such
effect. The challenging quest for physical models and simulation tools enabling microtransducer
CAD is the topic of this book. The book is intended as a text for graduate students in
Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems
industry.
