Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts
of the design of test structures for incorporation within test-vehicles scribe-lines and CMOS
products. The role of test structures in the development and monitoring of CMOS technologies
and products has become ever more important with the increased cost and complexity of
development and manufacturing. In this timely volume IBM scientists Manjul Bhushan and Mark
Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications
and bridging between circuit performance and characteristics of MOSFETs and other circuit
elements. Detailed examples are presented throughout many of which are equally applicable to
other microelectronic technologies as well. The authors¿ overarching goal is to provide
students and technology practitioners alike a practical guide to the disciplined design and use
of test structures that give unambiguous information on the parametrics and performance of
digital CMOS technology.
